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发布时间:2023-11-14 点击数:






会议名称:The 25th IEEE International Conference on sensorsIEEE SENSORS 2023

会议时间:October 29-November 1, 2023

会议地点:Vienna, Austria

会议简介:IEEE SENSORS 2023 is intended to provide a forum for research scientists, engineers, and practitioners throughout the world to present their latest research findings, ideas, and applications in the areas of sensors and sensing technologies. The IEEE is the world's largest technical professional society association dedicated to advancing technological innovation and excellence for the benefit of humanity. Founded in 1884 by a handful of practitioners of the new electrical engineering discipline, today's Institute is comprised of more than 400,000 members who conduct and participate in its activities in 160 countries. The men and women of the IEEE are the technical and scientific professionals making the revolutionary engineering advances, which are reshaping our world today.


Title: MEMS Pressure Sensor Based on Piezoresistive Effect of MoS2 Film

Author: Xing Pang, Qi Zhang, Xiaoya Liang and Yulong Zhao

Abstract: Molybdenum disulfide (MoS2) has excellent electrical and mechanical properties and can be used as sensors. 2D MoS2 is commonly used in sensors and is poorly compatible with MEMS. This paper found that vertical nanosheets of layered disulfide clamps deposited have excellent piezoresistive properties, which can be prepared in large areas. Its piezoresistive mechanism is attributed to the fact that the tension or compression of the substrate with the stress of the substrate causes an increase or decrease in the spacing of the MoS2 nanosheets between the layers, which results in a change in the resistance of the nanosheets between the layers. The piezoresistive factor of the MoS2 film was about 3~5. The MEMS pressure sensor based on novel MoS2 nanosheets was developed. The sensor showed a nonlinear error of 3.11%FS, a repeatability error of 1.75%FS, a hysteresis error of 0.74%FS, and basic accuracy of 3.64%FS.


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